carbanide,hafnium(4+),5-methylcyclopenta-1,3-diene
carbanide,hafnium(4+),5-methylcyclopenta-1,3-diene structure
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Common Name | carbanide,hafnium(4+),5-methylcyclopenta-1,3-diene | ||
|---|---|---|---|---|
| CAS Number | 68193-43-1 | Molecular Weight | 366.79900 | |
| Density | N/A | Boiling Point | N/A | |
| Molecular Formula | C14H20Hf | Melting Point | N/A | |
| MSDS | Chinese USA | Flash Point | N/A | |
| Symbol |
GHS07 |
Signal Word | Warning | |
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High-k gate dielectrics: current status and material properties considerations Wilk, G.D.; Wallace, R.M.; Anthony, J.M.
J. Appl. Phys. 89 , 5243, (2001)
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Gutsche, M.; Seidl, H.; Luetzen J.; Birner, A.; et. al
IEDM , 18.6.1, (2001)
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P. R.Chalker et. al.
Appl. Phys. Lett. 93 , 182911, (2008)
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Atomic Layer Deposition of HfO2 Thin Films Exploiting Novel Cyclopentadienyl Precursors at High Temperatures J. Niinisto et al.
Chem. Mater. , (2007)
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