Etching Silicon with HF–HNO3–H2SO4/H2O Mixtures–Unprecedente...
[Lippold, Marcus; Boehme, Uwe; Gondek, Christoph; Kronstein, Martin; Patzig-Klein, Sebastian; Weser, Martin; Kroke, Edwin European Journal of Inorganic Chemistry, 2012 , # 34 p. 5714 - 5721]
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