Abstract A new method for the synthesis of deoxyribonucleoside-phosphoramidite via an intermediate, 5′-0-dimethoxytritylthymidine-3′-0-diisopropylamino-phosphorochloridite, is reported. By using this method, several deoxyribonucleoside phosphoramidite derivatives with different protecting groups at phosphorus including P S and P N bond besides P O bond were synthesized.