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| 中文名 | 四(乙基甲基胺基)锆(IV) |
|---|---|
| 英文名 | tetrakis(ethylmethylamino)zirconium |
| 中文别名 | 四(乙基甲基氨基)锆(IV) |
| 英文别名 | TEMAZ (Tetrakis(ethylmethylamino)zirconium(IV) |
| 密度 | 1.049 g/mL at 25ºC(lit.) |
|---|---|
| 沸点 | 81ºC0.1 mm Hg(lit.) |
| 分子式 | C12H32N4Zr |
| 分子量 | 323.63300 |
| 闪点 | 50 |
| 精确质量 | 322.16700 |
| PSA | 12.96000 |
| LogP | 1.60960 |
| 外观性状 | 液体 |
| 储存条件 | 保存方法：密闭，阴凉，通风干燥处 |
| 稳定性 | 避氧化物、水分 |
| 更多 | 1. 性状：液体 2. 密度（g/mL, 20 ℃ ）：1.049 3. 相对蒸汽密度（g/mL,空气=1）：未确定 4. 熔点（ºC）：未确定 5. 沸点（ºC,常压）：未确定 6. 沸点（ºC0.1 mmHg）：81 7. 折射率：未确定 8. 闪点（ºF）：50 9. 比旋光度（º）：未确定 10. 自燃点或引燃温度（ºC）：10 11. 蒸气压（kPa,25ºC）：未确定12. 饱和蒸气压（kPa,60ºC）：未确定 13. 燃烧热（KJ/mol）：未确定 14. 临界温度（ºC）：未确定 15. 临界压力（KPa）：未确定 16. 油水（辛醇/水）分配系数的对数值：未确定 17. 爆炸上限（%,V/V）：未确定 18. 爆炸下限（%,V/V）：未确定 19. 溶解性：与水强烈反应 |
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Section 1: Product Identification Tetrakis(ethylmethylamino)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok® cylinder Chemical Name: (96-1070) for CVD/ALD CAS Registry Number:175923-04-3 Formula:Zr[N(CH3)(CH2CH3)]4 EINECS Number:none
Chemical Family:metal amide complex Synonym:Zirconium(IV) ethylmethylamide; Zirconium-tetrakis-ethylmethylamide Section 2: Composition and Information on Ingredients IngredientCAS NumberPercentACGIH (TWA)OSHA (PEL) Title compound175923-04-3100%5mg/m3 (as Zr)5mg/m3 (as Zr) Section 3: Hazards Identification Emergency Overview:Material is extremely irritating to skin, eyes and respiratory tract. Primary Routes of Exposure:Ingestion, inhalation of dust and vapor Eye Contact:Causes severe irritation to the eyes. Skin Contact:Causes severe irritation to the skin. Inhalation:Causes irritation to the nose, mucous membranes and respiratory tract. Ingestion may lead to burning sensation, dizziness, abdominal cramps, vomiting, bloody diarrhea, weakness Ingestion: and convulsions. Acute Health Affects:Causes severe irritation to the skin, eyes and respiratory tract. May be harmful if swallowed or inhaled. No information on long-term chronic effects. Repeated or prolonged exposure of the skin may cause Chronic Health Affects: dermatitis. NTP:No IARC:No OSHA:No SECTION 4: First Aid Measures Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need Eye Exposure: assistance in keeping their eye lids open. Get immediate medical attention. Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if Skin Exposure: irritation persists. Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty Inhalation: in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance. Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce Ingestion: vomiting only if directed by medical personnel. SECTION 5: Fire Fighting Measures Flash Point:no data Autoignition Temperature:no data Explosion Limits:no data Extinguishing Medium:carbon dioxide, foam or dry powder If this product is involved in a fire, fire fighters should be equipped with a NIOSH approved positive pressure Special Fire Fighting Procedures: self-contained breathing apparatus and full protective clothing. Hazardous Combustion andIf involved in a fire, this material may emit toxic and corrosive fumes. Decomposion Products: Unusual Fire or Explosion Hazards: Highly flammable. Releases flammable gas in contact with water. SECTION 6: Accidental Release Measures Eliminate all ignition sources and ensure adequate ventilation. Small spills can be mixed with vermiculite, Spill and Leak Procedures: sodium carbonate or other suitable non-combustible adsorbent and swept up. SECTION 7: Handling and Storage Store the material in a tightly sealed container under an inert atmosphere of nitrogen or argon. Keep away Handling and Storage: from heat and direct sunlight. SECTION 8: Exposure Controls and Personal Protection Eye Protection:Always wear approved safety glasses when handling a chemical substance in the laboratory. Skin Protection:Wear protective clothing and gloves. Ventilation:Handle the material in an efficient fume hood. If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator Respirator: Protection Program to be in compliance with 29 CFR 1910.134. Ventilation:Handle the material in an efficient fume hood. Additional Protection:No additional protection required. SECTION 9: Physical and Chemical Properties Color and Form:light yellow liq. Molecular Weight:323.63 Melting Point:not applicable Boiling Point:81°C /0.1mm Vapor Pressure:no data Specific Gravity:1.049 Odor:slight amine odor Solubility in Water:reacts with water SECTION 10: Stability and Reactivity Stability:moisture sensitive Hazardous Polymerization:no hazardous polymerization Conditions to Avoid:contact with water Incompatibility:Water, mineral acids, halogens and oxidizing agents Decomposition Products:Carbon dioxide, carbon monoxide, organic fumes and zirconium oxide. SECTION 11: Toxicological Information RTECS Data:No information available from the RTECS files. Carcinogenic Effects:no data Mutagenic Effects:no data Tetratogenic Effects:no data SECTION 12: Ecological Information Ecological Information:No information available. SECTION 13: Disposal Considerations Disposal:Dispose of this material according to local, state and federal regulations. SECTION 14: Transportation Shipping Name (CFR):Organometallic substance, Liquid, Water-reactive,Flammable Hazard Class (CFR):4.3 Additional Hazard Class (CFR):3 Packaging Group (CFR):II UN ID Number (CFR):UN# 3399 Shipping Name (IATA):Organometallic substance, Liquid,Water-reactive,Flammable Hazard Class (IATA):4.3 Additional Hazard Class (IATA):3 Packaging Group (IATA):II UN ID Number (IATA):UN# 3399 SECTION 15: Regulatory Information TSCA:Not listed in the TSCA inventory SARA (Title 313):Title compound not listed Second Ingredient:none SECTION 16 - ADDITIONAL INFORMATION N/A |
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生态学数据: 1、其它有害作用：通常对水是稍微危害的，若无政府许可，勿将材料排入周围环境。
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| 符号 |
GHS02, GHS07 |
|---|---|
| 信号词 | Danger |
| 危害声明 | H225-H261-H315-H319-H335 |
| 警示性声明 | P210-P231 + P232-P261-P305 + P351 + P338-P422 |
| 个人防护装备 | Eyeshields;Faceshields;full-face respirator (US);Gloves;multi-purpose combination respirator cartridge (US);type ABEK (EN14387) respirator filter |
| 危害码 (欧洲) | F,Xi |
| 风险声明 (欧洲) | R11 |
| 安全声明 (欧洲) | S16 |
| 危险品运输编码 | UN 3398 4.3/PG 2 |
| WGK德国 | 3 |
| 包装等级 | II |
| 危险类别 | 4.3 |