Abstract The donor-functionalised alkoxides {Me 3− x N (CH 2 CH 2 O) x}(L x; x= 1, 2) have been used to form gallium hydride complexes [{GaH 2 (L 1)} 2] and [{GaH (L 2)} 2] that are stable and isolable at room temperature. Along with a heteroleptic gallium tris (alkoxide) complex [Ga (L 1) 3] and the dimeric complex [{GaMe (L 2)} 2], these compounds have been used as single-source precursors for the deposition of Ga 2 O 3 by aerosol-assisted ...