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三氟化氮

三氟化氮用途

1.NF3是微电子工业中一种优良的等离子蚀刻气体,对硅和氮化硅的蚀刻,采用NF3和CF4+O2的混合气体有更高的蚀刻速率和选择性,而且对表面无污染。氢与NF3反应,在瞬间伴随放出大量的热,这就是NF3在高能化学激光器方面大量应用的原理。在高温下,NF3与有机化合物反应常伴有爆炸性,操作时应十分谨慎。

2.用作高能燃料。

三氟化氮名称

[ CAS 号 ]:
7783-54-2

[ 中文名 ]:
三氟化氮

[ 英文名 ]:
nitrogen trifluoride

[中文别名 ]:

[英文别名 ]:

三氟化氮物理化学性质

[ 密度 ]:
1.361 g/cm3

[ 沸点 ]:
-129°C

[ 熔点 ]:
-207°C

[ 分子式 ]:
F3N

[ 分子量 ]:
71.00190

[ 精确质量 ]:
70.99830

[ PSA ]:
3.24000

[ LogP ]:
0.94190

[ 外观性状 ]:
无色气体

[ 折射率 ]:
1.187

[ 储存条件 ]:
库房通风低温干燥,轻装轻卸,与氢气、还原剂、油脂分开存放

[ 水溶解性 ]:
insoluble

三氟化氮MSDS

三氟化氮毒性和生态

CHEMICAL IDENTIFICATION

RTECS NUMBER :
QX1925000
CHEMICAL NAME :
Nitrogen trifluoride
CAS REGISTRY NUMBER :
7783-54-2
LAST UPDATED :
199712
DATA ITEMS CITED :
28
MOLECULAR FORMULA :
F3-N
MOLECULAR WEIGHT :
71.01
WISWESSER LINE NOTATION :
N F3

HEALTH HAZARD DATA

ACUTE TOXICITY DATA

TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Rodent - rat
DOSE/DURATION :
6700 ppm/1H
TOXIC EFFECTS :
Lungs, Thorax, or Respiration - dyspnea Lungs, Thorax, or Respiration - cyanosis Lungs, Thorax, or Respiration - respiratory stimulation
REFERENCE :
TXAPA9 Toxicology and Applied Pharmacology. (Academic Press, Inc., 1 E. First St., Duluth, MN 55802) V.1- 1959- Volume(issue)/page/year: 26,1,1973
TYPE OF TEST :
LD50 - Lethal dose, 50 percent kill
ROUTE OF EXPOSURE :
Intraperitoneal
SPECIES OBSERVED :
Rodent - rat
DOSE/DURATION :
26 mg/kg
TOXIC EFFECTS :
Blood - methemoglobinemia-carboxyhemoglobin
REFERENCE :
TXAPA9 Toxicology and Applied Pharmacology. (Academic Press, Inc., 1 E. First St., Duluth, MN 55802) V.1- 1959- Volume(issue)/page/year: 17,585,1970
TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Rodent - mouse
DOSE/DURATION :
2000 ppm/4H
TOXIC EFFECTS :
Details of toxic effects not reported other than lethal dose value
REFERENCE :
34ZIAG "Toxicology of Drugs and Chemicals," Deichmann, W.B., New York, Academic Press, Inc., 1969 Volume(issue)/page/year: -,427,1969
TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Mammal - dog
DOSE/DURATION :
9600 ppm/1H
TOXIC EFFECTS :
Lungs, Thorax, or Respiration - cyanosis Blood - methemoglobinemia-carboxyhemoglobin
REFERENCE :
AMRL** Aerospace Medical Research Laboratory Report. (Aerospace Technical Div., Air Force Systems Command, Wright-Patterson Air Force Base, OH 45433) Volume(issue)/page/year: TR-69-84,1969
TYPE OF TEST :
LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Primate - monkey
DOSE/DURATION :
7500 ppm/1H
TOXIC EFFECTS :
Lungs, Thorax, or Respiration - cyanosis Blood - methemoglobinemia-carboxyhemoglobin
REFERENCE :
AMRL** Aerospace Medical Research Laboratory Report. (Aerospace Technical Div., Air Force Systems Command, Wright-Patterson Air Force Base, OH 45433) Volume(issue)/page/year: TR-69-84,1969 ** OTHER MULTIPLE DOSE TOXICITY DATA **
TYPE OF TEST :
TDLo - Lowest published toxic dose
ROUTE OF EXPOSURE :
Inhalation
SPECIES OBSERVED :
Rodent - rat
DOSE/DURATION :
100 ppm/7H/19W-I
TOXIC EFFECTS :
Liver - fatty liver degeneration Kidney, Ureter, Bladder - interstitial nephritis Blood - changes in spleen
REFERENCE :
TXAPA9 Toxicology and Applied Pharmacology. (Academic Press, Inc., 1 E. First St., Duluth, MN 55802) V.1- 1959- Volume(issue)/page/year: 4,770,1962
TYPE OF TEST :
TDLo - Lowest published toxic dose
ROUTE OF EXPOSURE :
Intraperitoneal
SPECIES OBSERVED :
Rodent - rabbit
DOSE/DURATION :
85 gm/kg/29D-I
REFERENCE :
TXAPA9 Toxicology and Applied Pharmacology. (Academic Press, Inc., 1 E. First St., Duluth, MN 55802) V.1- 1959- Volume(issue)/page/year: 4,770,1962 *** REVIEWS *** ACGIH TLV-TWA 29 mg/m3 (10 ppm) DTLVS* The Threshold Limit Values (TLVs) and Biological Exposure Indices (BEIs) booklet issues by American Conference of Governmental Industrial Hygienists (ACGIH), Cincinnati, OH, 1996 Volume(issue)/page/year: TLV/BEI,1997 *** U.S. STANDARDS AND REGULATIONS *** MSHA STANDARD-air:TWA 10 ppm (29 mg/m3) DTLVS* The Threshold Limit Values (TLVs) and Biological Exposure Indices (BEIs) booklet issues by American Conference of Governmental Industrial Hygienists (ACGIH), Cincinnati, OH, 1996 Volume(issue)/page/year: 3,187,1971 OSHA PEL (Gen Indu):8H TWA 10 ppm (29 mg/m3) CFRGBR Code of Federal Regulations. (U.S. Government Printing Office, Supt. of Documents, Washington, DC 20402) Volume(issue)/page/year: 29,1910.1000,1994 OSHA PEL (Construc):8H TWA 10 ppm (29 mg/m3) CFRGBR Code of Federal Regulations. (U.S. Government Printing Office, Supt. of Documents, Washington, DC 20402) Volume(issue)/page/year: 29,1926.55,1994 OSHA PEL (Shipyard):8H TWA 10 ppm (29 mg/m3) CFRGBR Code of Federal Regulations. (U.S. Government Printing Office, Supt. of Documents, Washington, DC 20402) Volume(issue)/page/year: 29,1915.1000,1993 OSHA PEL (Fed Cont):8H TWA 10 ppm (29 mg/m3) CFRGBR Code of Federal Regulations. (U.S. Government Printing Office, Supt. of Documents, Washington, DC 20402) Volume(issue)/page/year: 41,50-204.50,1994 *** OCCUPATIONAL EXPOSURE LIMITS *** OEL-AUSTRALIA:TWA 10 ppm (30 mg/m3) JAN 1993 OEL-BELGIUM:TWA 10 ppm (29 mg/m3) JAN 1993 OEL-DENMARK:TWA 10 ppm (29 mg/m3) JAN 1993 OEL-FINLAND:STEL 10 ppm (29 mg/m3) JAN 1993 OEL-FRANCE:TWA 10 ppm (30 mg/m3) JAN 1993 OEL-THE NETHERLANDS:TWA 10 ppm (29 mg/m3) JAN 1993 OEL-THE PHILIPPINES:TWA 10 ppm (29 mg/m3) JAN 1993 OEL-SWITZERLAND:TWA 10 ppm (30 mg/m3) JAN 1993 OEL-UNITED KINGDOM:TWA 10 ppm (30 mg/m3);STEL 15 ppm (45 mg/m3) JAN 1993 OEL IN BULGARIA, COLOMBIA, JORDAN, KOREA check ACGIH TLV OEL IN NEW ZEALAND, SINGAPORE, VIETNAM check ACGIH TLV *** NIOSH STANDARDS DEVELOPMENT AND SURVEILLANCE DATA *** NIOSH RECOMMENDED EXPOSURE LEVEL (REL) : NIOSH REL TO NITROGEN TRIFLUORIDE-air:10H TWA 10 ppm REFERENCE : NIOSH* National Institute for Occupational Safety and Health, U.S. Dept. of Health, Education, and Welfare, Reports and Memoranda. Volume(issue)/page/year: DHHS #92-100,1992 NIOSH OCCUPATIONAL EXPOSURE SURVEY DATA : NOHS - National Occupational Hazard Survey (1974) NOHS Hazard Code - 50885 No. of Facilities: 11 (estimated) No. of Industries: 1 No. of Occupations: 3 No. of Employees: 357 (estimated) NOES - National Occupational Exposure Survey (1983) NOES Hazard Code - 50885 No. of Facilities: 7 (estimated) No. of Industries: 1 No. of Occupations: 1 No. of Employees: 1096 (estimated) No. of Female Employees: 140 (estimated)

三氟化氮安全信息

[ 危害码 (欧洲) ]:
O: Oxidizing agent;

[ 风险声明 (欧洲) ]:
R8

[ 安全声明 (欧洲) ]:
S17-S23-S38

[ 危险品运输编码 ]:
2451

[ 危险类别 ]:
2.2

三氟化氮合成路线

三氟化氮制备

在熔融氟铵酸存在下,采用氨直接氟化工艺,其反应式为:

反应产物经过除雾器、淋洗器、分子筛吸附器,以及真空蒸馏,可分别除去各种杂质,最后用低温法收集得到NF3

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