Abstract It has been established that the reaction of triethyl-, dimethyl phenyl-and dimethyl benzyl-silanes with trifluoroacetic acid is rather complex and can include not only dehydrocondensation with the formation of acyl oxysilanes, but is also accompanied, to a considerable extent, by thermal transformation of trialkyl (aryl) silyl trifluoroacetates into the corresponding disiloxanes, the splitting of Si O and Si C bonds, ionic hydrogenation of ...