Abstract N, N′-Bis (chlorodimethylsilyl) tetramethylcyclodisilazane, which is obtained along with minor proportions of 1, 3-dichloro-1, 1, 3, 3-tetramethyldisilazane, 1, 5-dichloro-1, 1, 3, 3, 5, 5-hexamethyltrisilazane, and N-(chlorodimethylsilyl)-N′-(3-chloro-1, 1, 3, 3- tetramethyldisilazanyl) tetramethylcyclodisilazane by heating dichlorodimethylsilane and 2, 2, 4, 4, 6, 6-hexamethylcyclotrisilazane at 175, can be converted to its amino, methylamino ...
