The reaction of equimolar amounts of OMTS and PhSiF2Cl (I) at 25 С initially proceeds similarly to reaction (7)(reaction (8)); however, another process is observed after about 24 h that results in 1, 1, 1 trime thyl 3 phenyl 3, 3 difluorodisiloxane and pentame thylchlorodisiloxane (reaction (9)).