Abstract N-Organylbis (trimethylsilyl) amines of the general formula RN (SiMe 3) 2 (R= Me 3 Si, Et 3 Ge) were synthesized by reaction of sodium bis (trimethylsilyl) amide with the corresponding trialkylsilyl (germyl) halide. Their IR, UV, and 1 H, 13 C, and 29 Si NMR spectra were studied, and saturated vapor pressures and thermal stabilities were determined. The possibility of using the RN (SiMe 3) 2 compounds as precursors in ...