The perfluorohexylated 3, 4-ethylenedioxythiophene 5 was prepared via Mitsunobu reaction of perfluorohexylatyed diol 2 with diethyl 3, 4-dihydroxythiophenedicarboxylate followed by decarboxylation. The polymerization of 5 was conducted with both oxidative chemical and electrochemical polymerizations. The polymers were characterized by cyclic voltammogram, UV, IR, TGA and DSC.