Irradiation (253.7 nm) of cyclobutane, cyclopentane, and cyclohexane with tetrafluorohydraeine in the gas phase gives in high yield the corresponding difluoraminocycloalkanes. In contrast, similar treatment of cyclopropane results in a complex mixture including F (CH&NF,, F (CH&NF2, FCH2NF2, and F (CHZ) rCN. Possible processes by which these products arise and the role of excited intermediates are examined.