Some new α-trimethylsiloxy-ω-methyl (ethoxy) silyl substituted alkanes of the formula (CH3) 3SiO (CH2) n-Si (CH3) x(OC2H5) 3-x (x= 0, 1, 2; n= 5, 6) were synthesized. These compounds are stable and can undergo base catalysed decomposition producing 1-oxa-2- sila-2, 2-disubstituted cycloalkanes of the formulae (C2H5O) 2-x (CH3) x Si (CH2) n O (x= 0, 1, 2; n= 5, 6).