Abstract en] Tris (triethylsilyl) silanes,(Et 3 Si) 3 SiX (X= H, F, Cl, Br, I), have been prepared and their NMR, IR, Raman, and UV spectra recorded. The inductive effect of the ethyl groups on the Si 3 SiX bonding system is no greater than for the corresponding methyl compounds (Me 3 Si) 3 SiX