A diazirine compound, 1, 4-(1-azi-2, 2, 2-trifluoroethyl) benzoic acid, was used as a stable carbene precursor to react with Si–H terminated porous silicon (PSi) under microwave irradiation. After formation of a molecular monolayer, the end carboxyl group was converted to an amine-reactive crosslinker species, NHS ester, and finally to a Bovine Serum Albumin (BSA) monolayer on PSi.