Inorganic Chemistry

Synthesis and characterization of tetrakis (trihalogermyl) methanes. Molecules containing sterically strained carbon centers

PT Matsunaga, J Kouvetakis, TL Groy

文献索引：Matsunaga, Phillip T.; Kouvetakis, John; Groy, Thomas L. Inorganic Chemistry, 1995 , vol. 34, p. 5103 - 5104

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被引用次数: 20

摘要

We have recently used tetrasilylmethane,(H3Si) 4C,'in the presence of S ib and G eb to grow heteroepitaxial, diamondstructured Sil-,-, Ge, C, alloys on (1OO) Si containing 4-6 at.% C. 2 Encapsulating the C in a diamond-like, tetrahedral environment of Si eliminates strong CH bonds in the precursor. This novel approach allows the use of low temperature (470" C) growth conditions in the ultrahigh vacuum chemical vapor deposition (UHV-CVD) reactor ...