Transition metal amides have been extensively studied over the past three decades,'and they have recently drawn considerable interest as potential precursors for the synthesis of metal nitride thin films by chemical vapor deposition. 2 Our interest in such compounds has centered on those derived from symmetrical trifunctional amines which can be expected to confer volatility on the chelated metal. By employing (H2NCH2CH2) 3N (tren) a C3 or C3, ...
