The dipole moments of the compounds RC (O) OSi (p-FC6 H 4)(CH3} z with R= H, CH3, CICH2 have been determined in benzene, and are discussed together with those for the compounds RC (O) OSi (CH3h with the same groups R in terms of the conformation heterogenity. The 19F_NMR spectra of the former compounds revealed RC (O) OSi (CH3} z groups to have electron withdrawing effect and free rotation about C (O)-O (Si) bond.