Etching Silicon with HF–HNO3–H2SO4/H2O Mixtures–Unprecedented Formation of Trifluorosilane, Hexafluorodisiloxane, and Si–F Surface Groups

M Lippold, U Böhme, C Gondek…

文献索引：European Journal of Inorganic Chemistry, , # 34 p. 5714 - 5721

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被引用次数: 8

摘要

... KGaA, Weinheim. Issue. European Journal of Inorganic Chemistry. ... doi: 10.1002/ejic.201200674. Author Information. Department of Inorganic Chemistry, TU Bergakademie Freiberg, Leipziger Str. ... The unprecedented surface chemistry results from different silicon dissolution steps. ...