Vapor phase deposition of aluminum film on quartz substrate

DR Biswas, C Ghosh, RL Layman

文献索引：Journal of the Electrochemical Society, , vol. 130, p. 234 - 236

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被引用次数: 48

摘要

... Fig. i. A schematic diagram of metall- organic deposition chamber. 234 Page 2. ... Fig. 2. Vol. I30, No. ... i0, John Wiley & Sons, Inc., New York (1966). 4. RN Ghoshtagore, This Journal, 125, ii0 (1978). Manuscript submitted July 19, 1982; re- vised manuscript received Oct. 7, 1982. ...