Cycloalkyltrimethylsilanes, excepting cyclopropyl-, react with electrophiles by Si-Me bond splitting. Consequently silicon can be functionalized by this route. We also propose a new synthesis of cycloalkyldimethylfluoro (or chloro-) silanes. In the case of five or six member ring derivatives, the observed results are interpreted by a mechanism involving initial abstraction of hydride ion from the silicon substrate.