Self-Assembled On-Chip-Integrated Giant Magneto-Impedance Sensorics.

Daniil Karnaushenko, Dmitriy D Karnaushenko, Denys Makarov, Stefan Baunack, Rudolf Schäfer, Oliver G Schmidt

Index: Adv. Mater. 27 , 6582-9, (2015)

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Abstract

A novel method relying on strain engineering to realize arrays of on-chip-integrated giant magneto-impedance (GMI) sensors equipped with pick-up coils is put forth. The geometrical transformation of an initially planar layout into a tubular 3D architecture stabilizes favorable azimuthal magnetic domain patterns. This work creates a solid foundation for further development of CMOS compatible GMI sensorics for magnetoencephalography. © 2015 The Authors. Published by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.