Characteristics of GaAs, AlGaAs, and InGaAs materials grown by metalorganic chemical vapor deposition using an on??demand hydride gas generator
SG Hummel, Y Zou, CA Beyler, P Grodzinski…
Index: Applied Physics Letters, , vol. 60, p. 1483 - 1485
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Citation Number: 5
Abstract
... Citation: Applied Physics Letters 60, 1483 (1992); doi: 10.1063/1.107278 View online: http://dx.doi.org ... 1992 0003-6951/92/l 21483-03$03.00 @ 1992 American Institute of Physics I 483 ... The bottled undiluted arsine used in this way yielded material purity and device performance ...
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