Specular x-ray reflectivity studies of microstructure and ordering in self-assembled multilayers

…, W Lin, MK Durbin, TJ Marks, P Dutta

Index: Malik; Lin; Durbin; Marks; Dutta Journal of Chemical Physics, 1997 , vol. 107, # 2 p. 645 - 652

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Citation Number: 34

Abstract

Specular x-rayreflectivity has been used to probe the structures of self- assembledmonolayers and multilayers deposited using a three-step siloxane-based self- assembly technique that is repeated to form periodic multilayers. In films containing up to ten trilayers, it is found that the film thickness increases linearly as a function of the number of trilayers with no observable change in the surface roughness. Bragg peaks corresponding ...