Carbon tetrafluoride
Published date: 2022-03-14 11:03:37
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Name | Carbon tetrafluoride | CAS# | 75-73-0 |
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| Price | ￥Inquiry/1kg | Purity | 99.0% | |
| Stocking Period |
3 Day | Stock | In Stock | |
| Product Webpage: | http://www.rhfuye.com/pro01en/id/5.html | |||
| Detail
Product Information
Deion Halocarbon 14, CF4, (tetrafluoromethane) is a colorless, nonflammable, high-pressure gas. Gas Data Molecular Weight 88 Specific Gravity(Air=1) 3.04 Applications With added oxygen, CF4 (usually >80% mixture concentration) is used for plasma etching of polysilicon, silicon dioxide, silicon nitride, refractory metals and metal silicides. Etching and stripping of photoresists and other polymers are also major uses of CF4 (usually <20%) and oxygen mixtures. Specifications CF4 Property Unit Minimum Maximum CF4 %vol 99.999 -- O2 ppmv -- 1 N2 ppmv -- 4 CO ppmv -- 0.3
CO2 ppmv -- 0.5 SF6 ppmv -- 0.2 H2O ppmv -- 0.5 HF ppmw -- 0.1 TFC(C2F6/CH2F2/CHF3/C3F8) ppmv -- 1 Package Cylinder Size DOT3AA 2265-47L/DOT3AA 2265-43L Valve CGA 580 Brass/ 590 Brass/ 320 Brass /DISS716 This is common cylinders sizes.RUIHUA fills customer owned cylinders. Shipping Information DOT Label Green, Nonflammable Gas DOT Class 2.2 CAS No.: 75-73-0 UN Number 1982 More
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