Synthesis and characterization of volatile, fluorine-free β-ketoiminate lanthanide MOCVD precursors and their implementation in low-temperature growth of epitaxial …

…, CJ Flaschenriem, CL Stern, LM Liable-Sands…

Index: Edleman, Nikki L.; Wang, Anchuan; Belot, John A.; Metz, Andrew W.; Babcock, Jason R.; Kawaoka, Amber M.; Ni, Jun; Metz, Matthew V.; Flaschenriem, Christine J.; Stern, Charlotte L.; Liable-Sands, Louise M.; Rheingold, Arnold L.; Markworth, Paul R.; Chang, Robert P. H.; Chudzik, Michael P.; Kannewurf, Carl R.; Marks, Tobin J. Inorganic Chemistry, 2002 , vol. 41, # 20 p. 5005 - 5023

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Citation Number: 56

Abstract

A new class of volatile, low-melting, fluorine-free lanthanide MOCVD precursors has been synthesized and characterized. Neutral, monomeric cerium, neodymium, gadolinium, and erbium complexes are coordinatively saturated by a versatile, multidentate, ether- functionalized β-ketoiminato ligand. The cerium complex affords epitaxial CeO2 buffer layer films on single-crystal YSZ substrates by MOCVD at significantly lower growth ...