Tris (trimethylsilyl) silane reacts with oxygen to form bis (trimethylsiloxy)(trimethylsilyl) silane (Me3SiO) 2Si (H) SiMe3 as a major reaction product [1]. Oxidation of pentamethyldisilane can be used as a model reaction for studying oxidative conversions of silane polymers [2]. However, this reaction has not yet been studied.