1) Methyl-and ethyl-ethoxydichlorosilane were hydrolyzed with considerable dropping rate using pyridine as an acid acceptor. 2) Methyl-and ethyl-ethoxycyclotrisiloxane have been prepared and characterized. The former was found to be an unstable compound. 3) Methyl- and ethyl-ethoxycyclotetrasiloxane have been prepared and characterized. 4) Some brief data of infrared absorption spectra of those compounds have been presented.