Inorganic chemistry

Synthesis and characterization of volatile, thermally stable, reactive transition metal amidinates

BS Lim, A Rahtu, JS Park, RG Gordon

Index: Lim, Booyong S.; Rahtu, Antti; Park, Jin-Seong; Gordon, Roy G. Inorganic Chemistry, 2003 , vol. 42, # 24 p. 7951 - 7958

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Citation Number: 232

Abstract

A series of homoleptic metal amidinates of the general type [M (R-R'AMD) n] x (R= i Pr, t Bu, R'= Me, t Bu) has been prepared and structurally characterized for the transition metals Ti, V, Mn, Fe, Co, Ni, Cu, Ag, and La. The new compounds were found to have properties well- suited for use as precursors for atomic layer deposition (ALD) of thin films: high volatility, high thermal stability, and high and properly self-limited reactivity with molecular hydrogen ...