The thermal decomposition of methyltrichlorosilane (MTS) was studied in a flow system in the temperature range of 825-977 K and pressure range of 10-120 Torr. Yields of products were measured by gas chromatography. The rate constant, k 1, for the initiation reaction was determined from the sum of the rates of the termination reactions. The Arrhenius expression for this reaction at the high-pressure limit was obtained from a nonlinear least-squares fit ...
