A novel method has been found for the preparation of cyclic siliconmethylene compounds such as [(CH3) 2-SiCH212,[(CH3) 2SiCHz] 3,[C1 (CH3) SiCHZ] 2,[CZH~ O (CH~) S~ CH~]~,[C2H, 0 (CH,) SiCHz] 3, and others. The above cyclic compounds containing C1-or CtH50-groups bonded to silicon were converted to various derivatives such as [H (CH3) SiCH2I2,[H (CH3) SiCH2l3,[C& (CH~) S~ CHZ] Z,[C& (CH,) SiCHJ3, etc.