Abstract Pyrolysis of hexamethyldisiloxane (HMDS) and its copyrolysis with chlorotrimethylsilane and tetrachlorosilane were studied. Based on the data of GLC analysis and on the mass spectrum of the condensate obtained after the pyrolysis of HMDS, it was concluded that HMDS acts as a source of dimethylsilanone. The results of the copyrolysis of HMDS with chlorotrimethylsilane used as a trapping reagent indicate that the ...
