Influence of substrates on the nucleation and growth behaviors of Ge2Sb2Te5 films by combined plasma-enhanced atomic layer and chemical vapor deposition

…, S Choi, T Eom, SW Ryu, DY Cho, J Heo…

Index: Wilkerson, Kerri J.; Kappers, Menno J.; Hicks, Robert F. Journal of Physical Chemistry A, 1997 , vol. 101, # 13 p. 2451 - 2458

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Citation Number: 29

Abstract

... Select a Journal or Book ... Chemistry of Materials. ... Figure 1. (a) Changes in film layer density on the various substrates as a function of the number of supercycles (n cy ), (b) derivative of the layer density in (a) as a function of n cy , and (c−f) the variations in the film composition ...