Analytically pure t-butylperoxy phosphates,(R0) 2P (0) OOCMes (1, R= Me, Et, n-Pr, i-Pr, n- Bu, i-Bu, n-octyl, Ph, PhCH2), are prepared by reaction of the corresponding dialkylchlorophosphates (2) with an aqueous potassium hydroxide solution of t-butyl hydroperoxide in the presence of petroleum ether (bp 20-40"). Only peroxy esters 1 (R= n- Pr, i-Pr) are distillable; other methods of purification are presented.