Abstract Compounds of the composition RR′ SiFNR ″Si (CH 3) 3 (R= H, F, CH 3, C 2 H 5, C 3 H 7, C 2 H 3, C 6 H 5, C (CH 3) 3; R= F, CH 3, C 6 H 5; R ″= CH 3, C (CH 3) 3, Si (CH 3) 3) are obtained by the reaction of silicontetrafluoride or organo-substituted silicon-fluorides with the lithium salts of alkylsilylamines in a molar ratio of Full-size image (< 1 K)