Abstract A new route to 1, 1-difluoro-5-methylquasisilatrane (N→ Si) F 2 Si (OCH 2 CH 2) 2 NMe is elaborated: the reaction of chlorinated methyltrifluorosilanes F 3 SiCH 3− n Cl n (n= 1–3) as well as trifluoro (3-chloropropyl) silane and trifluoro (propenyl) silane with N-methyl- bis (2-hydroxyethyl) amine. The reactivity of the silanes F 3 SiCH 3− n Cl n increases with the number of chlorine atoms, that is, with the electronegativity of the CH 3− n Cl n group.